• Gas adsorption on surface of the metal
oxide changes
electrical resistance
• Reducing gas donates electrons and oxidizing
gas
"grabs" electrons.
• Change in resistance is a surface reaction
and
dependent upon the amount of
surface area.
• Surface interactions occur at elevated
temperatures
Synkera NanoMOS™ sensors
features/benefits
• Three unique sensor architectures: • Planar
sensors prepared via a thick film
screen
printing process • Multilayer
sensors • MEMS
sensors for low power and advanced
operating
modes
• Small size
• Improved sensitivity
• Low cost
• Fast Response
Operation of Planar and Multilayer
MOS Sensors
• Sensor Resistance is a function of analyte
concentration
• Log (resistance)
is proportional to Log (concentration)
• Power required for heater operation of
100 mW to 1W.
