MOS Sensor Operating Principles:
• Gas adsorption on surface of the metal oxide changes electrical resistance.
• Reducing gas donates electrons and oxidizing gas "grabs" electrons.
• Change in resistance is a surface reaction and dependent upon the amount of surface area.
• Surface interactions occur at elevated temperatures.
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Synkera NanoMOS™ sensors features/benefits
• Three unique sensor architectures:
• Planar sensors prepared via a thick film
screen printing process
• Multilayer sensors
• MEMS sensors for low power and
advanced operating modes
• Small size
• Improved sensitivity
• Low cost
• Fast Response
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Operation of Planar and Multilayer MOS Sensors
• Sensor Resistance is a function of analyte concentration
• Log (resistance) is proportional to Log (concentration)
• Power required for heater operation of 100 mW to 1W.
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