Overview

Synkera Technologies Inc. has combined its expertise in the areas of ceramic micromachining and gas sensing to produce a gas microsensor platform with unique capability. The platform utilizes anodic aluminum oxide, a material containing high aspect-ratio channels (pores) with diameters in the 10 to 100 nm range. These parallel pores, which grow in a self-organized fashion normal to the aluminum oxide surface, result in a structural material that inherently demonstrates a high surface area approaching 100 m²/g. These features make the material ideal for fabrication of gas sensing devices. Blank anodic aluminum substrates (approximately 100µm thick) are processed using chemical micromachining techniques to produce a thermally isolated area.

The as-prepared micromachined alumina, which initially is in an amorphous state, is then thermally processed to produce α  or γ  alumina ceramic. Application of gas sensitive compounds and metallic electrodes to this isolated area results in a small yet very robust microsensor element. Throughout the process, the nanostructured nature of the pores is maintained. The consequent high surface area, when combined with the small size of the thermally isolated sensing area, enables production of chemiresistive sensor exhibiting high sensitivity with low power consumption. Synkera has demonstrated a variety of practical methods for applying gas sensitive compounds to the sensor element, and has demonstrated superior sensing performance for a variety of gas constituents. Additionally, the company has produced microsensor assemblies of up to 6 microsensors on a single substrate, in anticipation of creating application specific sensor arrays.

Microsensor elements can be mounted in a variety of ways; currently, they are most commonly packaged on TO-39 headers as shown below. The thermally isolated area can be heated to up to 1000°C without damage, and has a demonstrated lifetime exceeding 10⁵cycles.

Performance Summary

Partnership Development

Partners are being sought to support commercialization of microsensor products based on this platform. If you would like to discuss this further, or need additional information, please contact:

Debra Deininger, Strategic Business Manager

ddeininger@synkera.com 720-494-8401 x 105